Modeling of the influence of field electron emission from a cathode with a thin insulating film on its sputtering in a gas discharge in a mixture of argon and mercury vapor

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Дәйексөз келтіру

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Аннотация

A model of the low-current gas discharge in a mixture of argon and mercury vapor in the presence of a thin insulating film on the cathode surface is proposed. The model takes into account that in such a mixture a substantial contribution to the ionization of the working gas can come from the ionization of mercury atoms during their collisions with metastable excited argon atoms. In the discharge, positive charges accumulate on the film surface, creating an electric field in the film sufficient to cause field emission of electrons from the cathode metal substrate into the insulator. Such electrons are accelerated in the film by the field and can escape from it into the discharge volume. As a result, the effective yield of ion-electron emission from the cathode increases. The temperature dependences of discharge characteristics are calculated and it is shown that, due to a rapid decrease in the concentration of mercury vapor in the mixture with decreasing temperature, the electric field strength in the discharge gap and the discharge voltage increase. The presence of a thin insulating film on the cathode can result in an improvement in its emission characteristics and a significant reduction in the discharge voltage. This causes a decrease in the energies of the ions and atoms bombarding the cathode surface, and, consequently, in the intensity of cathode sputtering in the discharge.

Толық мәтін

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Авторлар туралы

G. Bondarenko

HSE University

Хат алмасуға жауапты Автор.
Email: gbondarenko@hse.ru
Ресей, 101000, Moscow

V. Kristya

Bauman Moscow State Technical University

Email: kristya@bmstu.ru

Kaluga Branch

Ресей, 248000, Kaluga

D. Savichkin

Top Systems Ltd

Email: gbondarenko@hse.ru
Ресей, 127055, Moscow

M. Fisher

Bauman Moscow State Technical University, Kaluga Branch

Email: kristya@bmstu.ru
Ресей, 248000, Kaluga

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2. Fig. 1. Temperature dependence of the effective coefficient of ion-electron emission of the cathode (a), the ignition voltage of the discharge (b) and the ratio of current densities of mercury and argon ions at the cathode (c). Solid lines correspond to the cathode with a film, and dashed lines – without a film.

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3. Fig. 2. Energy distributions at the cathode of fluxes of argon (Ar+) and mercury (Hg+) ions, as well as fast argon atoms arising from elastic scattering of argon and mercury ions on slow argon atoms (Ar1) and (Ar2) in the absence of a dielectric film (a) on the cathode and in its presence (b).

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4. Fig. 3. Temperature dependence of the effective sputtering coefficients of the aluminum cathode with mercury ions (Hg+) and fast argon atoms arising from the elastic scattering of mercury ions on argon atoms (Ar2). Solid lines correspond to a cathode with a film, and dashed lines correspond to a cathode without a film.

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5. Fig. 4. Temperature dependence of the flux density of atoms atomized from the cathode. The solid line corresponds to a cathode with a film, and the dashed line corresponds to a non–film cathode.

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